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Proceedings Paper

Development of thick back-illuminated CCD to improve quantum efficiency in optical longer wavelength using high-resistivity n-type silicon
Author(s): Yukiko Kamata; Satoshi Miyazaki; Masaharu Muramatsu; Hisanori Suzuki; Kazuhisa Miyaguchi; Takeshi Go Tsuru; Shin-ichiro Takagi; Emi Miyata
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Paper Abstract

Quantum Efficiency (QE) of CCDs decreases at λ >~ 0.7 μm since photons penetrate a depletion layer of CCD. If one makes the layer thicker, the QE will be largely improved. In collaboration with HAMAMATSU Photonics, we have been developing the thicker CCDs which are implemented on the high resistivity n-type silicon wafers. We have made several wafer runs to optimize the basic characteristics of the devices such as charge transfer efficiency (CTE), full-well and node sensitivities of the amplifiers. The results obtained so far mostly satisfied the specifications imposed by astronomical observations. We also attempted to build back-side illuminated devices to realize high QE in wider wavelength. The test devices shows that the QE exceeds 60% at 1 μm, which is roughly 5 ~ 6 times improvement over ordinary CCDs. We will present the current status of the projects.

Paper Details

Date Published: 29 September 2004
PDF: 9 pages
Proc. SPIE 5499, Optical and Infrared Detectors for Astronomy, (29 September 2004); doi: 10.1117/12.552515
Show Author Affiliations
Yukiko Kamata, National Astronomical Observatory of Japan (Japan)
Satoshi Miyazaki, Subaru Telescope/National Astronomical Observatory of Japan (United States)
Masaharu Muramatsu, Hamamatsu Photonics K.K. (Japan)
Hisanori Suzuki, Hamamatsu Photonics K.K. (Japan)
Kazuhisa Miyaguchi, Hamamatsu Photonics K.K. (Japan)
Takeshi Go Tsuru, Kyoto Univ. (Japan)
Shin-ichiro Takagi, Kyoto Univ. (Japan)
Emi Miyata, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 5499:
Optical and Infrared Detectors for Astronomy
James D. Garnett; James W. Beletic, Editor(s)

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