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Proceedings Paper

Fundamental noise in MEMS force sensors
Author(s): Thomas W. Kenny; Yiching Liang; Beth L. Pruitt; Jonah A. Harley; Michael Bartsch; Robert Rudnitsky
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Paper Abstract

In recent years, MEMS devices have been developed for a wide variety of applications. Many of the signals that these sensors are intended to detect are expressed as forces that stress or deflect the micromechanical structure. As sensors are miniaturized, these forces naturally become smaller, and techniques for detection are required to improve. As the force sensing capabilities of MEMS devices have improved, it has become possible to apply these devices to interesting scientific experiments on biological systems.

Paper Details

Date Published: 25 May 2004
PDF: 9 pages
Proc. SPIE 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II, (25 May 2004); doi: 10.1117/12.549814
Show Author Affiliations
Thomas W. Kenny, Stanford Univ. (United States)
Yiching Liang, Stanford Univ. (United States)
Beth L. Pruitt, Stanford Univ. (United States)
Jonah A. Harley, Stanford Univ. (United States)
Michael Bartsch, Stanford Univ. (United States)
Robert Rudnitsky, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 5472:
Noise and Information in Nanoelectronics, Sensors, and Standards II
Janusz M. Smulko; Yaroslav Blanter; Mark I. Dykman; Laszlo B. Kish, Editor(s)

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