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Proceedings Paper

Silicon carbide micro- and nanoelectromechanical systems
Author(s): Mehran Mehregany; Christian A. Zorman
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Paper Abstract

Micro-and nanoelectromechanical systems (MEMS and NEMS) enable the development of smart products and systems by augmenting the computational ability of microelectronics with perception and control capabilities of micro/nanosensors and micro/nanoactuators. Silicon carbide (SiC) is well known for its excellent properties, making it an outstanding candidate as a structural material for MEMS and NEMS. This paper reviews some of the more significant accomplishments by our group in developing the 3C- polytype of SiC for MEMS and NEMS. Forming the cornerstone of this effort are two key thin film deposition systems that are used to deposit single crystalline and polycrystalline 3C-SiC films for bulk and surface micromachined devices. This paper presents an overview of these two deposition systems, their applicability in MEMS, as well as specific devices that have been fabricated using films from these reactors.

Paper Details

Date Published: 30 December 2003
PDF: 7 pages
Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.548920
Show Author Affiliations
Mehran Mehregany, Case Western Reserve Univ. (United States)
Christian A. Zorman, Case Western Reserve Univ. (United States)

Published in SPIE Proceedings Vol. 5342:
Micromachining and Microfabrication Process Technology IX
Mary Ann Maher; Jerome F. Jakubczak, Editor(s)

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