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Proceedings Paper

Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs and InP substrates
Author(s): B. Haji-Saeed; R. Kolluru; Dana Pyburn; R. Leon; S. K. Sengupta; Markus E. Testorf; W. D. Goodhue; Jed Khoury; Alvin J. Drehman; Charles L. Woods; John Kierstead
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Paper Abstract

The fabrication and characterization of an optically addressable deformable mirror for spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5-μm thick grid of patterned photoresist supports the 2-μm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the backside of the GaAs wafer. Similar devices were also fabricated with InP. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage and frequency. A simplified analysis of device operation is also presented.

Paper Details

Date Published: 12 April 2004
PDF: 8 pages
Proc. SPIE 5437, Optical Pattern Recognition XV, (12 April 2004); doi: 10.1117/12.548069
Show Author Affiliations
B. Haji-Saeed, Univ. of Massachusetts/Lowell (United States)
R. Kolluru, Univ. of Massachusetts/Lowell (United States)
Dana Pyburn, Univ. of Massachusetts/Lowell (United States)
R. Leon, Univ. of Massachusetts/Lowell (United States)
S. K. Sengupta, Univ. of Massachusetts/Lowell (United States)
Markus E. Testorf, Univ. of Massachusetts/Lowell (United States)
W. D. Goodhue, Univ. of Massachusetts/Lowell (United States)
Jed Khoury, Air Force Research Lab. (United States)
Alvin J. Drehman, Air Force Research Lab. (United States)
Charles L. Woods, Air Force Research Lab. (United States)
John Kierstead, Solid State Scientific Corp. (United States)

Published in SPIE Proceedings Vol. 5437:
Optical Pattern Recognition XV
David P. Casasent; Tien-Hsin Chao, Editor(s)

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