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Proceedings Paper

Comparative study of glass and plastic refractive microlenses and their fabrication techniques
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Paper Abstract

In this paper we review the most important fabrication techniques for glass and plastic refractive microlenses and we quantitatively characterize in a systematic way the corresponding state-of-the-art microlenses which we obtained from selected research groups. For all our measurements we rely on three optical instruments: a non-contact optical profiler, a transmission Mach-Zehnder interferometer and a Twyman-Green interferometer. To conclude we survey and discuss the different fabrication techniques by comparing the geometrical and optical characteristics of the microlenses.

Paper Details

Date Published: 8 September 2004
PDF: 13 pages
Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); doi: 10.1117/12.546709
Show Author Affiliations
Heidi Ottevaere, Vrije Univ. Brussel (Belgium)
Royall Cox, MicroFab Technologies, Inc. (United States)
Hans Peter Herzig, Univ. de Neuchatel (Switzerland)
Takaaki Miyashita, Ricoh Co., Ltd. (Japan)
Kris Naessens, Univ. Gent (Belgium)
Mohammad R. Taghizadeh, Heriot-Watt Univ. (United Kingdom)
Reinhard Volkel, SUSS MicroOptics SA (Switzerland)
H.J. Woo, Korea Institute of Geoscience and Mineral Resources (South Korea)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)

Published in SPIE Proceedings Vol. 5453:
Micro-Optics, VCSELs, and Photonic Interconnects
Hugo Thienpont; Kent D. Choquette; Mohammad R. Taghizadeh, Editor(s)

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