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Proceedings Paper

Phototriggered XeCl lasers: from the first prototype to the industrial device
Author(s): Bernard Lacour; Stephane Pasquiers; Vincent Puech; Daniel Blin; Ivan Tassy; Philippe Delaporte
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Paper Abstract

The phototriggering has been proposed many years ago as a way to improve the reliability of excimer lasers. It is now a mature technique that is used in conjunction with the most recent solid-state devices to make an industrial high average power excimer laser. After a brief historical introduction we here analyze the main features and scientific aspects of this discharge technique and give very recent results.

Paper Details

Date Published: 20 September 2004
PDF: 13 pages
Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); doi: 10.1117/12.546693
Show Author Affiliations
Bernard Lacour, LPGP, CNRS and Univ. de Paris-Sud (France)
Stephane Pasquiers, LPGP, CNRS and Univ. de Paris-Sud (France)
Vincent Puech, LPGP, CNRS and Univ. de Paris-Sud (France)
Daniel Blin, ONECTRA (France)
Ivan Tassy, ONECTRA (France)
Philippe Delaporte, LP3, CNRS and Univ. de la Mediterranee-Aix Marseille II (France)

Published in SPIE Proceedings Vol. 5448:
High-Power Laser Ablation V
Claude R. Phipps, Editor(s)

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