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Proceedings Paper

Integrated asymmetric vertical coupler pressure sensors
Author(s): Isa Kiyat; Askin Kocabas; Imran Akcag; Atilla Aydinli
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Paper Abstract

Design and analysis of a novel pressure sensor based on a silicon-on-insulator asymmetric integrated vertical coupler is presented. The coupler is composed of a single mode low index waveguide and a thin silicon slab. Wavelength selective optical modulation of asymmetric vertical coupler is examined in detail. Its potential for sensing applications is highlighted as an integrated optical pressure sensor which can be realized by standard silicon micro-fabrication. Sensitivity of transmission of such couplers on refractive index change of silicon slab ensures that they are good candidates for applications requiring high sensitivities.

Paper Details

Date Published: 16 August 2004
PDF: 9 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.546070
Show Author Affiliations
Isa Kiyat, Bilkent Univ. (Turkey)
Askin Kocabas, Bilkent Univ. (Turkey)
Imran Akcag, Bilkent Univ. (Turkey)
Atilla Aydinli, Bilkent Univ. (Turkey)

Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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