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Proceedings Paper

Study of the roughness and optical near field of mass surface by using a SNOM with shear-force regulation
Author(s): Youssef Haidar; Frederique de Fornel; Chouki Zerouki; Patrick Pinot
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Paper Abstract

In mass metrology, the stability of weights, such as standard kilograms, has always been a major concern. Models have been used to describe the various factors that affect mass stability. Surface quality is one important factor that can include the amount and type of pollution present on the surface. However, another important factor is surface roughness. Methods for determining surface roughness differ in their lateral and height resolution and also by the type of information that each method provides, such as: profile, image of defects, power-spectral-density, surface auto-correlation function, or different statistical parameters such as the root-mean-square (rms) height (or roughness) δ.

Paper Details

Date Published: 17 August 2004
PDF: 12 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545692
Show Author Affiliations
Youssef Haidar, OCP-LPUB, CNRS (France)
Frederique de Fornel, OCP-LPUB, CNRS (France)
Chouki Zerouki, BMN-INM, CNAM (France)
Patrick Pinot, BNM-INM, CNAM (France)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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