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Proceedings Paper

Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrations
Author(s): Bruno Serio; Jean-Jacques Hunsinger; Bernard Cretin
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Paper Abstract

In this paper, we present a versatile vibrometer developed to characterize in-plane responses of MEMS. This system can be used either in microscope configuration for very small displacements (nanometer resolution) or in macro configuration for large range of displacement measurements (field of view up to 10 x 10 mm with sub-pixel accuracy). The system is based both on an homemade stroboscope with incremental phase shifts and a digital CCD camera to record a video sequence of the moving MEMS "frozen" by a strobe LED at four equally spaced phases. The periodic motion of the specimen is accurately estimated by computing the value of the displacements between successive images. We have used an interpolation-correlation based image motion estimation algorithm with subpixel accuracy. Both, experimental setup and stroboscopic module used for MEMS motion measurements are described. The correlation estimation method used to calculate the displacements with subpixel accuracy between consecutive frames is also described. Using the vibrometer we have investigated the mode shapes of a silicium cantilever beam with a large field of view, and a subpixel resolution. The experimental measurements are shown to be in good agreement with analytical predictions.

Paper Details

Date Published: 17 August 2004
PDF: 8 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545586
Show Author Affiliations
Bruno Serio, FEMTO-ST, CNRS (France)
Jean-Jacques Hunsinger, FEMTO-ST, CNRS (France)
Bernard Cretin, FEMTO-ST, CNRS (France)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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