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Metrology of refractive microlens arrays
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Paper Abstract

The metrology of refractive microlens arrays is analyzed using Twyman-Green, Mach-Zehnder, and white light interferometers. The advantages and limitations of each are discussed in their application to the measurement of spherical and aspherical microlens arrays.

Paper Details

Date Published: 17 August 2004
PDF: 9 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545458
Show Author Affiliations
Kenneth J. Weible, SUSS MicroOptics SA (Switzerland)
Reinhard Volkel, SUSS MicroOptics SA (Switzerland)
Martin Eisner, SUSS MicroOptics SA (Switzerland)
Samuel Hoffmann, Univ. de Neuchatel (Switzerland)
Toralf Scharf, Univ. de Neuchatel (Switzerland)
Hans-Peter Herzig, Univ. de Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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