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Proceedings Paper

Novel 2-chip-concept for micromechanically tunable long-wavelength VCSELs for the 1.55 µm wavelength range
Author(s): Markus Maute; Frank Riemenschneider; Markus Ortsiefer; Robert Shau; Peter Meissner; Markus-Christian Amann
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Paper Abstract

In this paper, a novel two-chip-concept for an electrically pumped and micro-mechanically tunable vertical-cavity surface-emitting laser (VCSEL) operating in the 1.55 μm wavelength range is presented. One chip contains the active region with 5 quantum wells based on the material system AlGaInAs/InP and a buried tunnel junction (BTJ) to provide current confinement and waveguiding. A dielectric mirror forms the back reflector. The second chip consists of a curved mirror membrane that can be displaced by electro-thermal heating. The main advantage of this approach is that both parts can be optimized separately. Packaged laser devices show continuous-wave operation at room temperature with an output power of up to 200 μW and very good side mode suppression in the order of 45 dB. Single-mode operation was observed across a tuning range of more than 30 nm.

Paper Details

Date Published: 8 September 2004
PDF: 9 pages
Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); doi: 10.1117/12.544848
Show Author Affiliations
Markus Maute, Technische Univ. Munchen (Germany)
Frank Riemenschneider, Technische Univ. Darmstadt (Germany)
Markus Ortsiefer, VERTILAS GmbH (Germany)
Robert Shau, VERTILAS GmbH (Germany)
Peter Meissner, Technische Univ. Darmstadt (Germany)
Markus-Christian Amann, Technische Univ. Munchen (Germany)

Published in SPIE Proceedings Vol. 5453:
Micro-Optics, VCSELs, and Photonic Interconnects
Hugo Thienpont; Kent D. Choquette; Mohammad R. Taghizadeh, Editor(s)

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