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Proceedings Paper

Fabrication and characterization of single-mode integrated polymer waveguide components
Author(s): Ermile Gaganidze; Karsten Litfin; Johannes Boehm; Steffi Finke; Patric Henzi; Roland Heidinger; Wilhelm Pfleging; Lothar Steinbock
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Paper Abstract

In this work the fabrication of integrated polymer waveguide components (waveguides, S-bends, splitters) by means of several approaches is reported. Fabrication of one type of waveguide involves laser-assisted micro-patterning of small grooves in (Polymethylmethacrylat) PMMA substrates which are subsequently filled with index-matched materials. Another type of waveguide is realized by local physical modification of PMMA in a laser direct writing process. The transmission characteristics of the waveguide were studied at the optical communication wavelengths of 1520-1620 nm. Fabrication of filled waveguides with oil as waveguide medium yielded low loss of 2.6 dB/cm and single-mode behavior for 10 μm wide grooves. Filling of 20 μm grooves with PMMA/MMA/dye mixture and subsequent polymerization yielded multi-mode waveguides with higher loss of 5.9 dB/cm. The laser direct writing (Nd:YAG, 266 nm) of waveguides showed loss of 6.3 dB/cm and multi-mode behavior indicating a need for further process optimization. Two Y-splitters fabricated by laser patterning and filling with branch radii of 10 mm and 25 mm showed device loss of 16 dB and 19 dB for a 25 mm device length. These results are compared to the performance of reference Y-splitters fabricated by UV-lithography, where parametric studies of the device geometry revealed the best branch radius of 20 mm.

Paper Details

Date Published: 18 August 2004
PDF: 8 pages
Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); doi: 10.1117/12.544768
Show Author Affiliations
Ermile Gaganidze, Forschungszentrum Karlsruhe (Germany)
Karsten Litfin, Forschungszentrum Karlsruhe (Germany)
Johannes Boehm, Forschungszentrum Karlsruhe (Germany)
Steffi Finke, Forschungszentrum Karlsruhe (Germany)
Patric Henzi, Forschungszentrum Karlsruhe (Germany)
Roland Heidinger, Forschungszentrum Karlsruhe (Germany)
Wilhelm Pfleging, Forschungszentrum Karlsruhe (Germany)
Lothar Steinbock, Forschungszentrum Karlsruhe (Germany)

Published in SPIE Proceedings Vol. 5451:
Integrated Optics and Photonic Integrated Circuits
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

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