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Proceedings Paper

Short coherence transmitted light interferometer for the thickness measurement of Si membranes
Author(s): Ulrich Breitmeier; Klaus Leonhardt
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Paper Abstract

As is shown the thickness of thin membranes and MEMS can be measured using a transmission short coherence interference technique and choosing a suitable wavelength range in the infrared. The method evaluates the phase difference between the object and reference beam and the actual instrument can accommodate a wide thickness measurement range.

Paper Details

Date Published: 10 September 2004
PDF: 6 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.544492
Show Author Affiliations
Ulrich Breitmeier, Breitmeier Messtechnik GmbH (Germany)
Klaus Leonhardt, Leoptik (Germany)

Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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