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Proceedings Paper

Surface plasmon resonance heterodyne interferometry for measuring physical parameters
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Paper Abstract

A light beam is incident on the boundary surface between the thin metal film of a surface-plasmon-resonance (SPR) apparatus and the test medium. If the incident angle is equal or very near to the resonant angle, then the phase difference between p- and s- polarizations of the reflected light is related to the associated physical parameter. The phase difference can be measured accurately by the heterodyne interferometry. If the relation between the phase difference and the associated physical parameter is specified, the associated physical parameter can be estimated with the data of the phase difference. This method has the advantages of both common-path interferometry and heterodyne interferometry.

Paper Details

Date Published: 10 September 2004
PDF: 8 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.544484
Show Author Affiliations
Der-Chin Su, National Chiao Tung Univ. (Taiwan)
Jing-Heng Chen, National Chiao Tung Univ. (Taiwan)
Kun-Huang Chen, National Chiao Tung Univ. (Taiwan)
Jiun-You Lin, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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