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Proceedings Paper

Multi-layered grating diffraction graphical user interfaced simulation toolbox in the MATLAB environment
Author(s): Mark Auslender; Avi Bergel; Nathan Pinhas; Shlomo Hava
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Paper Abstract

Theoretical work of our group is placed in the general frame of efforts to improve numerical performance and efficiency of rigorous coupled-wave analysis of grating diffraction. Mathematical transformation of Maxwell equations for a multi-layered structure to evolution equations in functional space is presented. By-construction numerically stable symbolic algorithm to solve these equations using the notion of in-layer scattering operator is proposed. On the base of this algorithm a toolbox for simulation of diffraction from multi-layered grating structures, implemented by a graphical user interface is developed. An example of simulation using this in-house software is exposed.

Paper Details

Date Published: 18 June 2004
PDF: 11 pages
Proc. SPIE 5349, Physics and Simulation of Optoelectronic Devices XII, (18 June 2004); doi: 10.1117/12.543636
Show Author Affiliations
Mark Auslender, Ben-Gurion Univ. of the Negev (Israel)
Avi Bergel, Ben Gurion Univ. of the Negev (Israel)
Nathan Pinhas, Ben-Gurion Univ. of the Negev (Israel)
Shlomo Hava, Ben-Gurion Univ. of the Negev (Israel)

Published in SPIE Proceedings Vol. 5349:
Physics and Simulation of Optoelectronic Devices XII
Marek Osinski; Hiroshi Amano; Fritz Henneberger, Editor(s)

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