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Proceedings Paper

InGaAs/InP focal plane arrays for visible light imaging
Author(s): Tara J. Martin; Marshall J. Cohen; J. Christopher Dries; Michael J. Lange
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Paper Abstract

We report on recent results in using InGaAs/InP focal plane arrays for visible light imaging. We have fabricated substrate-removed backside illuminated InGaAs/InP focal plane arrays down to a 10 μm pitch with high quantum efficiency from 0.4 μm through 1.7 μm. This focal plane array can be used for visible imaging as well as imaging eye-safe lasers. Using the InGaAs/InP materials system for visible imaging applications has several advantages over silicon based CMOS or CCD imagers including inherent radiation hardness, the ability to simultaneously achieve low crosstalk (less than 1%), and bandwidths exceeding 1 GHz, as well as the ability to image out to 1.7 μm.

Paper Details

Date Published: 30 August 2004
PDF: 8 pages
Proc. SPIE 5406, Infrared Technology and Applications XXX, (30 August 2004); doi: 10.1117/12.542523
Show Author Affiliations
Tara J. Martin, Sensors Unlimited, Inc. (United States)
Marshall J. Cohen, Sensors Unlimited, Inc. (United States)
J. Christopher Dries, Sensors Unlimited, Inc. (United States)
Michael J. Lange, Sensors Unlimited, Inc. (United States)

Published in SPIE Proceedings Vol. 5406:
Infrared Technology and Applications XXX
Bjorn F. Andresen; Gabor F. Fulop, Editor(s)

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