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Proceedings Paper

Sub-micron sized periodic 3D surface structures fabricated by femtosecond UV laser pulses
Author(s): Jan-Hendrik Klein-Wiele; Peter Simon
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Paper Abstract

Generation of versatile periodic 3d structures with sub-micron precision on material surfaces is demonstrated. The technique is based on a novel beam splitting scheme applying separate diffractive elements. The incoming beam is split into multiple beams whose phase relations are controlled with almost arbitrary precision by only changing the distance between the diffractive elements. Combining this technique with a reflective imaging system, temporal and spatial overlap of all beams with interferometric precision is automatically obtained. The periodic 3d structures are generated through multi-beam interference in the overlapping region of the beams. The shape of the resulting pattern depends on the phase relationship of the interfering beams and can be strongly altered by simple translation of only one diffractive element. We demonstrate the capability of the method for femtosecond laser treatment of solids. Using sub picosecond laser pulses at 248 nm, sub-micron features with different shapes are ablated on the surface of polyimide samples. The size of the achieved structures is well below 1 micron, in special cases even reaching the 100 nm limit.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540757
Show Author Affiliations
Jan-Hendrik Klein-Wiele, Laser-Lab. Goettingen e.V. (Germany)
Peter Simon, Laser-Lab. Goettingen e.V. (Germany)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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