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Proceedings Paper

Microdrilling, -scribing and cutting with high-quality and high-power ns-Nd:YAG systems
Author(s): Alexander Binder; David Ashkenasi; Norbert Mueller; Thomas Riesbeck; Hans Joachim Eichler
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Paper Abstract

To meet the industry's demand for reducing machine cycle lengths concerning laser-drilling a Nd:YAG Master-Oscillator Power-Amplifier (MOPA)-system was developed at the LMTB-laboratories that emits high-power peak-pulses at excellent beam-quality. Presently, the output power of the oscillator (10W@1064nm) with a beam-quality of M2 = 1.3 is amplified to 95W@1064 nm with M2=2.3 and a single pulse energy up to 500 mJ. The pulse duration can be varied between 26 and 230 ns. On account of the excellent beam quality, frequency conversion resulted in 49W@532nm and 4.8@266nm. The MOPA-System is used for laser micro drilling experiments into metals and ceramics where the influence of the beam quality on the geometrical shape of the hole is investigated and compared with applications conducted with similar laser systems. Additionally means in optimizing the drilling process such as burr-minimizing and melt-reduction were introduced. Furthermore, experiments using tapered drilling technique are undertaken. A maximum aspect ratio of 1:200 in stainless steel was obtained.

Paper Details

Date Published: 18 November 2003
PDF: 6 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540748
Show Author Affiliations
Alexander Binder, Laser- und Medizin-Technologie GmbH (Germany)
David Ashkenasi, Laser- und Medizin-Technologie GmbH (Germany)
Norbert Mueller, Laser- und Medizin-Technologie GmbH (Germany)
Thomas Riesbeck, Technische Univ. Berlin (Germany)
Hans Joachim Eichler, Technische Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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