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Proceedings Paper

A low-noise MEMS accelerometer for unattended ground sensor applications
Author(s): Kevin E. Speller; Duli Yu
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Paper Abstract

A low-noise micro-machined servo accelerometer has been developed for use in Unattended Ground Sensors (UGS). Compared to conventional coil-and-magnet based velocity transducers, this Micro-Electro-Mechanical System (MEMS) accelerometer offers several key benefits for battlefield monitoring. Many UGS require a compass to determine deployment orientation with respect to magnetic North. This orientation information is critical for determining the bearing of incoming signals. Conventional sensors with sensing technology based on a permanent magnet can cause interference with a compass when used in close proximity. This problem is solved with a MEMS accelerometer which does not require any magnetic materials. Frequency information below 10 Hz is valuable for identification of signal sources. Conventional seismometers used in UGS are typically limited in frequency response from 20 to 200 Hz. The MEMS accelerometer has a flat frequency response from DC to 5 kHz. The wider spectrum of signals received improves detection, classification and monitoring on the battlefield. The DC-coupled output of the MEMS accelerometer also has the added benefit of providing tilt orientation data for the deployed UGS. Other performance parameters of the MEMS accelerometer that are important to UGS such as size, weight, shock survivability, phase response, distortion, and cross-axis rejection will be discussed. Additionally, field test data from human footsteps recorded with the MEMS accelerometer will be presented.

Paper Details

Date Published: 1 September 2004
PDF: 10 pages
Proc. SPIE 5417, Unattended/Unmanned Ground, Ocean, and Air Sensor Technologies and Applications VI, (1 September 2004); doi: 10.1117/12.540337
Show Author Affiliations
Kevin E. Speller, Applied MEMS Inc. (United States)
Duli Yu, Applied MEMS Inc. (United States)

Published in SPIE Proceedings Vol. 5417:
Unattended/Unmanned Ground, Ocean, and Air Sensor Technologies and Applications VI
Edward M. Carapezza, Editor(s)

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