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Proceedings Paper

Distributed MEMS-microvalves-suitable structure for improving performances of intelligent pneumatic two-dimensional microconveyer
Author(s): Yves-Andre Chapuis; Yamato Fukuta; Yoshio Mita; Hiroyuki Fujita
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Paper Abstract

In this paper, a design approach was proposed to define suitable structures of distributed controlled MEMS used in a pneumatic two-dimensional microconveyance system. After an introduction to distributed systems, a brief survey of their applications in the field of micromanipulation and prospect in industrial microfabrication was presented. Afterward, the authors introduced the notion of intelligent motion surface used in the field of pneumatic microconveyance. They analyzed suitable distributed structures based on elementary microconveyance, which are supposed to provide an appropriate air-flow force and overcome microfluidic problems. The first microconveyer prototype was fabricated by using bulk micromachining technique. It was developed to estimate MEMS density required to produce an elementary force to convey a micro-object. Then, a specific distributed structure was proposed to develop the pneumatic two-dimensional microconveyer device. The device size is 35 x 35 mm2 for 560 MEMS-microvalves, controlled by distributed arrays and processed by a centralized intelligence via a microprocessor. From experimental conveyance results, we can conclude to the feasibility of the pneumatic microconveyance by distributed air-flow microactuators.

Paper Details

Date Published: 29 July 2004
PDF: 11 pages
Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.539683
Show Author Affiliations
Yves-Andre Chapuis, Univ. of Tokyo (Japan)
LEPSI (France)
Yamato Fukuta, Univ. of Tokyo (Japan)
Yoshio Mita, Univ. of Tokyo (Japan)
Hiroyuki Fujita, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 5389:
Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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