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Proceedings Paper

High-temperature negative resist tunable for new lift-off applications
Author(s): Medhat A. Toukhy; PingHung Lu; Kate Kao; Robert Plass; Ching-Hui Chen; Gerald L. Faerber
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Paper Abstract

A new negative resist performance was demonstrated for elevated temperature, thick metal sputter process and lift-off application. This resist, AZ EXP nLOF 7000, can endure temperatures in excess of 220°C without pattern profile slope change. The applied resist thickness is ~ 3 μm and is processed to produce sufficient side wall slope adequate for up to 2μm sputter deposited metal thickness and lift-off process.

Paper Details

Date Published: 14 May 2004
PDF: 5 pages
Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); doi: 10.1117/12.537561
Show Author Affiliations
Medhat A. Toukhy, Clariant Corp. (United States)
PingHung Lu, Clariant Corp. (United States)
Kate Kao, Clariant Corp. (United States)
Robert Plass, Clariant Corp. (United States)
Ching-Hui Chen, Lumileds Lighting (United States)
Gerald L. Faerber, Lumileds Lighting (United States)

Published in SPIE Proceedings Vol. 5376:
Advances in Resist Technology and Processing XXI
John L. Sturtevant, Editor(s)

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