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Proceedings Paper

Propagation of APC models across product boundaries
Author(s): Tito Chowdhury; Mark Freeland; Ole Krogh; Geethakrishnan Narasimhan; Gayathri Raghavendra
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Paper Abstract

The BCT solution is an automatic correction for systematic offset built into the PCS product based on calibration from 2-5 wafers. This paper explores the validity of a predictive model for process control for use by manufacturers of semiconductor devices with a multitude of products or part numbers. The proposed model defines the parameters of interests as a function of the film stack, tool attributes, and mask characteristics. The paper proposes a process for model development that dramatically reduces the cost of materials, tool time, and engineering effort.

Paper Details

Date Published: 29 April 2004
PDF: 7 pages
Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); doi: 10.1117/12.536454
Show Author Affiliations
Tito Chowdhury, Cypress Semiconductor Corp. (United States)
Mark Freeland, Blue Control Technologies (United States)
Ole Krogh, Blue Control Technologies (United States)
Geethakrishnan Narasimhan, Cypress Semiconductor Corp. (United States)
Gayathri Raghavendra, Blue Control Technologies (United States)

Published in SPIE Proceedings Vol. 5378:
Data Analysis and Modeling for Process Control
Kenneth W. Tobin Jr., Editor(s)

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