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Proceedings Paper

Method to improve the resolution of contact holes
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Paper Abstract

Various methods of printing small contact holes are discussed. Although the resolution capability is one key object for printing small contacts, it does not always reflect the process window. This paper compares resolution as well as process windows for several contact printing techniques. It shows the huge benefit of ring-type contacts with respect to process window even when compared to Bessel like contacts.

Paper Details

Date Published: 28 May 2004
PDF: 14 pages
Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); doi: 10.1117/12.535246
Show Author Affiliations
Gerhard Kunkel, Infineon Technologies (Germany)
Ralf Ziebold, Infineon Technologies (Germany)


Published in SPIE Proceedings Vol. 5377:
Optical Microlithography XVII
Bruce W. Smith, Editor(s)

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