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Proceedings Paper

Mix-and-match overlay method by compensating dynamic scan distortion error
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Paper Abstract

This paper discusses the compensation method and APC system to reduce errors in mix and matching overlay between scanners. We proposed the compensation model for intra-field errors in mix and matching. And we developed the advanced APC system also to improve dynamic scan distortion using the compensation model.

Paper Details

Date Published: 29 April 2004
PDF: 7 pages
Proc. SPIE 5378, Data Analysis and Modeling for Process Control, (29 April 2004); doi: 10.1117/12.535097
Show Author Affiliations
Takuya Kono, Toshiba Corp. (Japan)
Manabu Takakuwa, Toshiba Corp. (Japan)
Keita Asanuma, Toshiba Corp. (Japan)
Nobuhiro Komine, Toshiba Corp. (Japan)
Tatsuhiko Higashiki, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 5378:
Data Analysis and Modeling for Process Control
Kenneth W. Tobin Jr., Editor(s)

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