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Proceedings Paper

Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask
Author(s): Sung Hoon Pieh; Byoung-Ho Park; Yu-Jin Jang; Kang-Hyun Kim; Gyu-Tae Kim
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Paper Abstract

We describe a simple concept of an in situ photolithographic technique by using a liquid crystal display panel as a configurable mask and a CCD (charge coupled device) camera as a simple imaging system. The successive operation of imaging and configurable masking enabled a real-time projection lithography process by the selective exposure of light through LCD (liquid crystal display) panel. A correction of a defect pattern could be also demonstrated by optimizing the exposure conditions and aligning the mismatches between imaging and the corresponding lithographic patterning.

Paper Details

Date Published: 28 May 2004
PDF: 7 pages
Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); doi: 10.1117/12.534501
Show Author Affiliations
Sung Hoon Pieh, Korea Univ. (South Korea)
Byoung-Ho Park, Korea Univ. (South Korea)
Yu-Jin Jang, Korea Univ. (South Korea)
Kang-Hyun Kim, Korea Univ. (South Korea)
Gyu-Tae Kim, Korea Univ. (South Korea)

Published in SPIE Proceedings Vol. 5377:
Optical Microlithography XVII
Bruce W. Smith, Editor(s)

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