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Proceedings Paper

Development of high-repetition-rate molecular fluorine lasers for metrology and inspection
Author(s): Heinz P. Huber; Michael Bauer; Andreas J. Goertler; Claus F. Strowitzki; Alexander Hohla
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Paper Abstract

A new generation of compact Fluorine lasers has been developed for repetition rates up to 2 kHz. The output powers are in the range of 3 W at 157 nm. Due to the introduction of new concepts for the laser tube and the pulsed power module it was possible to increase the maximum repetition rate from 1 kHz to 2 kHz without any loss in the performance of the laser output parameters. The pulse-to-pulse stability of the laser energy is improved in comparison to previous laser generations. The results of long term tests and measurements of the laser output characteristic will be reported in detail. The state-of-the-art of compact excimer lasers will be presented and an outlook for future trends will be given.

Paper Details

Date Published: 24 May 2004
PDF: 6 pages
Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004);
Show Author Affiliations
Heinz P. Huber, TuiLaser AG (Germany)
Michael Bauer, TuiLaser AG (Germany)
Andreas J. Goertler, TuiLaser AG (Germany)
Claus F. Strowitzki, TuiLaser AG (Germany)
Alexander Hohla, TuiLaser AG (Germany)

Published in SPIE Proceedings Vol. 5375:
Metrology, Inspection, and Process Control for Microlithography XVIII
Richard M. Silver, Editor(s)

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