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Proceedings Paper

Monolithic integration of optical waveguides and MEMS-based switching in silicon-on-insulator
Author(s): Howie R. Stuart; Frieder H. Baumann; Annjoe Wong-Foy
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Paper Abstract

We demonstrate a MEMS-based 1x2 optical waveguide switch fabricated entirely within silicon-on insulator (SOI). The switch is formed by a suspended cantilever structure consisting of a single mode ridge waveguide in silicon; lateral electrostatic actuation by an adjacent electrode enables switching. Actuation voltages as low as 40 Volts are achieved, with switching speeds on the order of 130 μsec. We demonstrate extinction between ports of more than 31 dB. These switches can be easily integrated with conventional SOI-based waveguide devices to enable a low-power consumption, scalable device platform for telecommunications applications.

Paper Details

Date Published: 29 December 2003
PDF: 8 pages
Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); doi: 10.1117/12.532618
Show Author Affiliations
Howie R. Stuart, Lucent Technologies/Bell Labs. (United States)
Frieder H. Baumann, Lucent Technologies/Bell Labs. (United States)
Annjoe Wong-Foy, Lucent Technologies/Bell Labs. (United States)

Published in SPIE Proceedings Vol. 5347:
Micromachining Technology for Micro-Optics and Nano-Optics II
Eric G. Johnson; Gregory P. Nordin, Editor(s)

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