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Proceedings Paper

Microfluidic channel fabrication by PDMS-interface bonding
Author(s): Winnie W.Y. Chow; Kin Fong Lei; Guanyi Shi; Wen Jung Li; Qiang Huang
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Paper Abstract

A novel technique to bond polymer substrates using PDMS-interface bonding is presented in this paper. This novel bonding technique is promising to achieve precise, well-controlled, low temperature bonding of micro fluidic channels. A thin (10-25μm) Poly(dimethylsiloxane) (PDMS) intermediate layer was used to bond two polymer (PMMA) substrates without distorting them. Micro channel patterns were compressed on a PMMA substrate by hot embossing technique first. Then, PDMS was spin-coated on another PMMA bare substrate and cured in two stages. In the first stage, it was pre-cured at room temperature for 20 hours to evaporate the solvents. Subsequently, it was bonded to the hot embossed PMMA substrate. In the second stage, PDMS was completely cured at 90°C for 3 hours and the bonding was successfully achieved at this relatively low temperature. Tensile bonding tests showed that the bonding strength was about 0.015MPa. Micro fluidic channels with dimensions of 1mmx2cmx1mm were successfully fabricated using this novel bonding method.

Paper Details

Date Published: 29 March 2004
PDF: 8 pages
Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); doi: 10.1117/12.532382
Show Author Affiliations
Winnie W.Y. Chow, Chinese Univ. of Hong Kong (China)
Kin Fong Lei, Chinese Univ. of Hong Kong (China)
Guanyi Shi, Beijing Institute of Technology (China)
Wen Jung Li, Chinese Univ. of Hong Kong (China)
Qiang Huang, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 5275:
BioMEMS and Nanotechnology
Dan V. Nicolau; Uwe R. Muller; John M. Dell, Editor(s)

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