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Proceedings Paper

Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed-laser deposition
Author(s): Richard F. Haglund Jr.; Rene Lopez; J. Y. Suh; Leonard C. Feldman; Tony E. Haynes; Lynn A. Boatner
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Paper Abstract

Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser depo-sition, patterned arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.

Paper Details

Date Published: 15 July 2004
PDF: 10 pages
Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.532331
Show Author Affiliations
Richard F. Haglund Jr., Vanderbilt Univ. (United States)
Rene Lopez, Vanderbilt Univ. (United States)
J. Y. Suh, Vanderbilt Univ. (United States)
Leonard C. Feldman, Vanderbilt Univ. (United States)
Oak Ridge National Lab. (United States)
Tony E. Haynes, Oak Ridge National Lab. (United States)
Lynn A. Boatner, Oak Ridge National Lab. (United States)

Published in SPIE Proceedings Vol. 5339:
Photon Processing in Microelectronics and Photonics III
Jan J. Dubowski; Peter R. Herman; Friedrich G. Bachmann; Willem Hoving; Jim Fieret; David B. Geohegan; Frank Träger; Kunihiko Washio; Alberto Pique; Xianfan Xu; Tatsuo Okada, Editor(s)

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