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Proceedings Paper

MEMS microscanning mirror for barcode reading: from development to production
Author(s): Alexander Wolter; Harald Schenk; Eric Gaumont; Hubert Lakner
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Paper Abstract

The micro scanning mirror with lateral out-of-plane comb drives is on its way to volume fabrication. This article reviews the development and highlights the most important activities and decisions that are representative for many MEMS devices that are supposed to go the same way. Careful analysis of the product requirements, design for reliability, design for testability, design for packaging, a mature process, and automated testing preferably on wafer-level have been identified as keys to volume fabrication of MEMS.

Paper Details

Date Published: 24 January 2004
PDF: 8 pages
Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); doi: 10.1117/12.530795
Show Author Affiliations
Alexander Wolter, Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany)
Harald Schenk, Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany)
Eric Gaumont, Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany)
Hubert Lakner, Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany)

Published in SPIE Proceedings Vol. 5348:
MOEMS Display and Imaging Systems II
Hakan Urey; David L. Dickensheets, Editor(s)

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