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Proceedings Paper

Microaccelerometers using cured SU-8 as structural material
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Paper Abstract

In this paper, we report a research effort to design, analyze, and fabricate a novel type of microaccelerometer using UV lithography of SU-8 and UV-LIGA process. Instead of using SU-8 only as photo resist as in silicon-based MEMS fabrication processes, cured SU-8 was used as the primary structural material in fabricating the micro sensors. A commercial software, ANSYS, was used to design the suitable size for the spring-mass and capacitors to achieve the desired bandwidth and the maximum sensitivity. The preliminary results obtained so far have proved the feasibility of fabrication of micro accelerometer using cured SU-8 polymer as the primary structural material and using UV-LIGA as the major fabrication tool.

Paper Details

Date Published: 24 January 2004
PDF: 9 pages
Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.530783
Show Author Affiliations
Seok Jae Jeong, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 5344:
MEMS/MOEMS Components and Their Applications
Siegfried W. Janson; Albert K. Henning, Editor(s)

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