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Proceedings Paper

Nanocrystal sensitization of Er in silica for Si-based optical material at 1.5 um
Author(s): Jung H Shin; Kwan-Sik Cho; Ji-Hong Jhe; Gun Yong Sung; Baek-Hyun Kim; Seong-Ju Park
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Paper Abstract

Nanocrystal Si (nc-Si) sensitization of Er in a silica matrix to obtain high optical activity in a Si-compatible material is investigated. Er-doped silicon-rich silicon oxide (SRSO) films, which consist of nc-Si embedded inside an SiO2 matrix, were deposited by electron-cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) using SiH4 and O2 with concurrent sputtering of Er followed by a high temperature anneal. For comparison, Er-free SRSO films were also deposited. Detailed investigation of processing conditions indicates that an annealing process consisting of 30 min anneal at 950°C without hydrogenation to be optimum for activation of Er. Investigation of MOS diode structure with Er-doped and Er-free SRSO films indicates that a mesa-type structure with n+ poly-silicon top contact, p-type substrate, and SRSO Si content of less than 40% gives the best diode performance. Er-free SRSO diodes fabricated using the optimum conditions show electroluminescence under forward bias. Er-doped SRSO diodes show photoresponse at 1.54 μm due to nanocrystal -- Er interactions, showing the promise of developing integrated, Si-based 1.54 μm light detectors for integrated microphotonic devices.

Paper Details

Date Published: 6 July 2004
PDF: 9 pages
Proc. SPIE 5359, Quantum Sensing and Nanophotonic Devices, (6 July 2004); doi: 10.1117/12.529273
Show Author Affiliations
Jung H Shin, Korea Advanced Institute of Science and Technology (South Korea)
Kwan-Sik Cho, Korea Advanced Institute of Science and Technology (South Korea)
Ji-Hong Jhe, Korea Advanced Institute of Science and Technology (South Korea)
Gun Yong Sung, Electronics and Telecommunications Research Institute (South Korea)
Baek-Hyun Kim, Kwangju Institute of Science and Technology (South Korea)
Seong-Ju Park, Kwangju Institute of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 5359:
Quantum Sensing and Nanophotonic Devices
Manijeh Razeghi; Gail J. Brown, Editor(s)

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