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Proceedings Paper

Fabrication of optical ring resonators in silicon on insulator
Author(s): William Robert Headley; Graham T. Reed; Ansheng Liu; Oded Cohen; D. Hak; Mario J. Paniccia; Simon Howe; Inga Huille
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Paper Abstract

In an effort to determine low-cost alternatives for components currently used in DWDM, optical ring resonators are currently being investigated. The well-known microfabrication techniques of silicon, coupled with the low propagation loss of single crystal silicon, make SOI an attractive material. Laterally coupled racetrack resonators utilising rib waveguides have been fabricated and preliminary results are discussed. An extinction ratio of 15.9 dB and a finesse of 11 have been measured.

Paper Details

Date Published: 1 July 2004
PDF: 8 pages
Proc. SPIE 5357, Optoelectronic Integration on Silicon, (1 July 2004); doi: 10.1117/12.527420
Show Author Affiliations
William Robert Headley, Univ. of Surrey (United Kingdom)
Graham T. Reed, Univ. of Surrey (United Kingdom)
Ansheng Liu, Intel Corp. (United States)
Oded Cohen, Intel Corp. (Israel)
D. Hak, Intel Corp. (Israel)
Mario J. Paniccia, Intel Corp. (United States)
Simon Howe, Univ. of Surrey (United Kingdom)
Inga Huille, Univ. of Surrey (United Kingdom)

Published in SPIE Proceedings Vol. 5357:
Optoelectronic Integration on Silicon
David J. Robbins; Ghassan E. Jabbour, Editor(s)

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