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Proceedings Paper

Laser microfabrication of photonic crystal structures on silicon wafers
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Paper Abstract

A new, versatile approach, applicable to virtually all substrate compositions on laser precision microfabrication of silicon wafers to achieve long-range ordering of colloidal crystals is proposed and demonstrated. In the absence of any surface pattern, the colloid spheres assemble in a randomly packed fashion. However, the presence of a surface pattern induces an ordered packing of the spheres on the lands with hexagonal packing. The colloidal crystal order can be controlled by choosing suitable spatial period of the laser micro-machined template.

Paper Details

Date Published: 29 December 2003
PDF: 5 pages
Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); doi: 10.1117/12.524569
Show Author Affiliations
Qiying Chen, National Research Council (Canada)
Suwas Nikumb, National Research Council (Canada)

Published in SPIE Proceedings Vol. 5347:
Micromachining Technology for Micro-Optics and Nano-Optics II
Eric G. Johnson; Gregory P. Nordin, Editor(s)

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