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Proceedings Paper

Design/deposition process tradeoffs for high performance optical coatings in the DUV spectral region
Author(s): J. Earl Rudisill
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Paper Abstract

The selection of coating materials for the design and production of optical components has to satisfy at least two criteria: (1) the component’s spectral performance requirements and (2) the survivability in the system’s operational environment. In many instances tradeoffs are required to satisfy both conditions. This paper offers tradeoffs in the material selection and deposition process conditions that provide high performance, stable coating structures for optical components in the deep ultraviolet (DUV) for excimer laser microlithography and micromachining applications. A critical necessity of these coatings is long lifetime survivability under the continuous operation of high fluence, pulsed laser irradiation; the continuous operation can number in the tens of billions pulses. Spectral performance data and lifetime survivability data will be presented.

Paper Details

Date Published: 10 June 2004
PDF: 11 pages
Proc. SPIE 5273, Laser-Induced Damage in Optical Materials: 2003, (10 June 2004); doi: 10.1117/12.524042
Show Author Affiliations
J. Earl Rudisill, Newport Corp. (United States)

Published in SPIE Proceedings Vol. 5273:
Laser-Induced Damage in Optical Materials: 2003
Gregory J. Exarhos; Arthur H. Guenther; Norbert Kaiser; Keith L. Lewis; M. J. Soileau; Christopher J. Stolz, Editor(s)

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