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Proceedings Paper

High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
Author(s): Xue Chuan Shan; Yoichi Murakoshi; Zhenfeng Wang; H. J. Lu; Yufeng Jin; Tsuyoshi Ikehara; Ryutaro Maeda; C. K. Wong
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Paper Abstract

In micro fabricated gas turbine engine, a micro journal air bearing is used to offer high speed and low wear operations. Fabrication of such a journal bearing is a critical challenge since the clearance of the bearing is only several micrometers with aspect ratio of more than 20. This paper reports on the fabrication of ultra-high aspect ratio micro journal air bearing using ICP DRIE (inductively coupled plasma deep reactive ion etching) process. The process parameters that resulted in bowed and tpaered journal bearing were investigated to improve the profile of the etched journal bearing. Micro journal bearings with sidewall verticality of almost 90° were obtained.

Paper Details

Date Published: 2 April 2004
PDF: 6 pages
Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); doi: 10.1117/12.522918
Show Author Affiliations
Xue Chuan Shan, SIMTech (Singapore)
Yoichi Murakoshi, National Institute of Advanced Industrial Science and Technology (Japan)
Zhenfeng Wang, SIMTech (Singapore)
H. J. Lu, SIMTech (Singapore)
Yufeng Jin, SIMTech (Singapore)
Tsuyoshi Ikehara, National Institute of Advanced Industrial Science and Technology (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)
C. K. Wong, SIMTech (Singapore)


Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)

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