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Proceedings Paper

Manufacturing microdroplet generators with Laser-LIGA technique
Author(s): Joeska Husny; Hengyi Jin; Erol C. Harvey; Justin J Cooper-White
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Paper Abstract

Monodisperse micro-drops have been created successfully in T-shaped microchannels fabricated with the 'modified’ excimer laser-LIGA technique. This technique eliminates the surface wetting problems and the occurrence of a deeper ablation path which happened during the joining of different section of the microchannel with the dynamic laser ablation mode. The experimental study on the shear-induced drop formation from T-shaped microchannels shows that the drop size decreases with increasing shear and that a maximum drop productivity was observed depending on the value of the dispersed phase flowrate used.

Paper Details

Date Published: 2 April 2004
PDF: 7 pages
Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); doi: 10.1117/12.522744
Show Author Affiliations
Joeska Husny, Univ. of Melbourne (Australia)
Hengyi Jin, Swinburne Univ. of Technology (Australia)
Erol C. Harvey, Swinburne Univ. of Technology (Australia)
Justin J Cooper-White, Univ. of Melbourne (Australia)

Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)

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