We report the observation of sample behaviors using the confocal laser scanning microscopy (CLSM) in on-chip microcapillary. Sample loading by pinched valve injection is observed in a new cross injector shape, which has the structure added conventional cross injector to circle shape. In sample loading, because this structure causes a different electric field compared with that in conventional cross injector, high efficient sample plug injection was performed. It is important to investigate further the detailed sample profiles using the CLSM in sample loading for development of the on-chip microcapillary. We attempt the simulation of sample loading in the cross injector using the semiconductor device simulator MEDICI in order to investigate it in further detail. The sample movements in the channel turn along the Z-direction are observed using the CLSM. In order to miniaturize the microfluidic channel, it is necessarily needed to fold the channel, but then it is inevitable that sample dispersion occurs in the turn. We present sample flow profiles along the Z-direction in the turn using the CLSM and the influence on the electrophoretic separation. Also, we improve that fabrication of duct channel for exhaustion the vaporized xylene to outside the chip and the adhesion process

Date Published: 2 April 2004
PDF: 10 pages
Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); doi: 10.1117/12.522260

Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)