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Proceedings Paper

Large-output-force out-of-plane MEMS actuator array
Author(s): Takashi Fukushige; Seiichi Hata; Akira Shimokohbe
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Paper Abstract

We present herein a new out-of-plane MEMS actuator array. Previously, we developed out-of-plane MEMS actuators having a 180-μm stroke in the out-of-plane direction. However, the maximum output force, scale of integration and density of integration were limited to 0.087 mN, four actuators and 4 mm2/actuator, respectively. In the present paper, we propose a new calculation method by which to estimate the maximum output force and driving voltage according to conventional mechanics of materials. The improved shape of the actuator was derived using this method, and the maximum output force was increased up to 0.83 mN, which is approximately 10 times larger than that of the previous actuator. The scale and density of integration were improved via multilayer interconnection up to 100 actuators (25 times) and 1 mm2/actuator (a four-fold increase), respectively. In addition, we examined the driving behavior of the actuator array.

Paper Details

Date Published: 2 April 2004
PDF: 10 pages
Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); doi: 10.1117/12.521842
Show Author Affiliations
Takashi Fukushige, Tokyo Institute of Technology (Japan)
Seiichi Hata, Tokyo Institute of Technology (Japan)
Akira Shimokohbe, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 5276:
Device and Process Technologies for MEMS, Microelectronics, and Photonics III
Jung-Chih Chiao; Alex J. Hariz; David N. Jamieson; Giacinta Parish; Vijay K. Varadan, Editor(s)

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