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Proceedings Paper

On-line vision measurement system for small thickness
Author(s): Huijie Zhao; Yonggang Li; Peng Du
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Paper Abstract

A novel vision measurement system specially designed for on-line measurement of thickness of micrograph of work-piece is presented. This system consists of CCD camera, telecentric microscopic lens, illumination, image sampling and processing unit etc. The telecentric microscopic lens and relating LED illumination system is carefully designed to fit the environment on-line such as: illumination, vibration, noise light and out-of focus so as to reduce the measurement error. The following image processing techniques are studied. (1) a new image preprocessing method based on gray level, gradient and spatial information is developed to get rid of the noise in image. (2) several image segmentation methods and the results are analyzed and the evaluation system of image segmentation and the relating evaluation standards are discussed to satisfy the requirement of on-line automatic image segmentation. Finally, an iterative least-square method is utilized to calculate the thickness of the micrograph in order to improve the measurement precision further. The results show that the precision of the vision measurement system is sub-pixel, which can fully satisfy the requirement of industry.

Paper Details

Date Published: 2 September 2003
PDF: 4 pages
Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.521689
Show Author Affiliations
Huijie Zhao, Beijing Univ. of Aeronautics and Astronautics (China)
Yonggang Li, Beijing Univ. of Aeronautics and Astronautics (China)
Peng Du, Beijing Univ. of Aeronautics and Astronautics (China)

Published in SPIE Proceedings Vol. 5253:
Fifth International Symposium on Instrumentation and Control Technology
Guangjun Zhang; Huijie Zhao; Zhongyu Wang, Editor(s)

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