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Proceedings Paper

Study on lateral dual-element electron tunneling accelerometer
Author(s): Yuhe Li; Qingxiang Li; Zhifeng Long; Yanyang Zi; Dapeng Zhao; Yangkuan Guo
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Paper Abstract

Electron tunneling accelerometer has the advantages of high precision, small volume, low consumption and so on. This paper introduces the design on a lateral dual-element Electron Tunneling Accelerometer. The model, structure design, parameters test and fabrication process are provided in detail. The results of analysis and simulation show that the working frequency of sensor could be up to 2 kHz.

Paper Details

Date Published: 2 September 2003
PDF: 6 pages
Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); doi: 10.1117/12.521359
Show Author Affiliations
Yuhe Li, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)
Zhifeng Long, Tsinghua Univ. (China)
Yanyang Zi, Tsinghua Univ. (China)
Dapeng Zhao, Tsinghua Univ. (China)
Yangkuan Guo, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 5253:
Fifth International Symposium on Instrumentation and Control Technology
Guangjun Zhang; Huijie Zhao; Zhongyu Wang, Editor(s)

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