Physical basis of desorption and ablation are presented focusing mostly on the primary and secondary mechanisms and short pulses interaction with materials. Facilities used in pulse laser deposition (PLD) are discussed in respect to the PLD system working with an excimer laser which has been just set up at the Institute of Optoelectronics Military University of Technology. Directions of present and future applications are shown on the basis of the Proceedings of the last two Conferences on Laser Ablation COLA i.e. in Germany (1999) and Japan (2001). Own examinations on the PLD layers of FeAl and Ni₃Al intermetallics produced using an excimer KrF as well as of TiN deposited by means of a Nd:YAG laser are presented.

Date Published: 6 October 2003
PDF: 10 pages
Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); doi: 10.1117/12.520712

Published in SPIE Proceedings Vol. 5229:
Laser Technology VII: Applications of Lasers
Wieslaw L. Wolinski; Zdzislaw Jankiewicz; Ryszard Romaniuk, Editor(s)