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Proceedings Paper

LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer
Author(s): Dean V. Wiberg; Nosang V. Myung; Beverley Eyre; Kirill Shcheglov; Otto J. Orient; Eric Moore; Philip Munz
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Paper Abstract

A 3X3 array of hyperboloid quadrupole mass filters with a 3 mm pole length was fabricated using the LIGA (LIthographic Galvanoformung and Abformung) process. Electrical connectivity and spatial orientation are established by bonding the pole array to a low temperature co-fired ceramic (LTCC) substrate. A miniature scroll pump for vacuum pumping with a scroll height of 3 mm was also fabricated using the LIGA process. New LIGA fabrication steps (e.g. expose and developed freestanding PMMA, compression bonding of electroplating base and PMMA, low-stress electroplated films) have been developed to fabricate ultra thick PMMA molds with high aspect ratios (70:1) and high precision. Computational analysis was performed to estimate the miniature scroll pump performance characteristics.

Paper Details

Date Published: 25 July 2003
PDF: 6 pages
Proc. SPIE 4878, First Jet Propulsion Laboratory In Situ Instruments Workshop, (25 July 2003); doi: 10.1117/12.520540
Show Author Affiliations
Dean V. Wiberg, Jet Propulsion Lab. (United States)
Nosang V. Myung, Jet Propulsion Lab. (United States)
Beverley Eyre, Jet Propulsion Lab. (United States)
Kirill Shcheglov, Jet Propulsion Lab. (United States)
Otto J. Orient, Jet Propulsion Lab. (United States)
Eric Moore, Univ. of Southern California (United States)
Philip Munz, Univ. of Southern California (United States)

Published in SPIE Proceedings Vol. 4878:
First Jet Propulsion Laboratory In Situ Instruments Workshop
Gregory H. Bearman; Patricia M. Beauchamp, Editor(s)

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