A 3X3 array of hyperboloid quadrupole mass filters with a 3 mm pole length was fabricated using the LIGA (LIthographic Galvanoformung and Abformung) process. Electrical connectivity and spatial orientation are established by bonding the pole array to a low temperature co-fired ceramic (LTCC) substrate. A miniature scroll pump for vacuum pumping with a scroll height of 3 mm was also fabricated using the LIGA process. New LIGA fabrication steps (e.g. expose and developed freestanding PMMA, compression bonding of electroplating base and PMMA, low-stress electroplated films) have been developed to fabricate ultra thick PMMA molds with high aspect ratios (70:1) and high precision. Computational analysis was performed to estimate the miniature scroll pump performance characteristics.

Date Published: 25 July 2003
PDF: 6 pages
Proc. SPIE 4878, First Jet Propulsion Laboratory In Situ Instruments Workshop, (25 July 2003); doi: 10.1117/12.520540

Published in SPIE Proceedings Vol. 4878:
First Jet Propulsion Laboratory In Situ Instruments Workshop
Gregory H. Bearman; Patricia M. Beauchamp, Editor(s)