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Proceedings Paper

Study of torsion-beam actuator based on low applied voltage
Author(s): Wei Dong; Xin-Dong Zhang; Caixia Liu; Shuang Zhang; Hui Tan; Cuiping Jia; Jianxuan Pan; Buwen Xiao; Ping Ji; Baokun Xu; Wei-You Chen
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Paper Abstract

Micromechanical optical switch has a good quality for free-space optical cross connects, particularly in terms of the low insertion loss, low crosstalk, low polarization dependent loss (PDL), wavelength-independence, and bit-rate transparency. In research of micromechanical optical switches, the electrostatic torsion beam actuator is widely used. But this actuator needs high-applied voltage. In this paper, the actuator with the slant counter electrode was proposed and fabricated with tilted 3° (111) silicon wafer.

Paper Details

Date Published: 7 May 2004
PDF: 5 pages
Proc. SPIE 5281, Optical Transmission, Switching, and Subsystems, (7 May 2004); doi: 10.1117/12.519719
Show Author Affiliations
Wei Dong, Jilin Univ. (China)
Xin-Dong Zhang, Jilin Univ. (China)
Caixia Liu, Jilin Univ. (China)
Shuang Zhang, Jilin Univ. (China)
Hui Tan, Institute of Jilin Province (China)
Cuiping Jia, Jilin Univ. (China)
Jianxuan Pan, Jilin Univ. (China)
Buwen Xiao, Jilin Univ. (China)
Ping Ji, Jilin Univ. (China)
Baokun Xu, Jilin Univ. (China)
Wei-You Chen, Jilin Univ. (China)

Published in SPIE Proceedings Vol. 5281:
Optical Transmission, Switching, and Subsystems
Cedric F. Lam; Chongcheng Fan; Norbert Hanik; Kimio Oguchi, Editor(s)

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