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Proceedings Paper

Development of next generation excimer lasers for industrial applications
Author(s): Vladimir M. Borisov; Andrei I. Demin; Anatoli V. Eltsov; Oleg B. Khristoforov; Yuriy B. Kiryukhin; Alexander V. Prokofiev; Aleksandr Yu. Vinokhodov; V. A. Vodchits
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Paper Abstract

The report reviews the results of developments of the perspective excimer lasers which has been carried out in Pulsed Laser System Laboratory at TRINITI. We present parameters of XeCl laser (λ=308 nm) with average power up to 500 W and ArF laser (λ=193 nm) with a pulse repetition rate ≥6 kHz.

Paper Details

Date Published: 6 October 2003
PDF: 9 pages
Proc. SPIE 5137, International Conference on Lasers, Applications, and Technologies 2002: Advanced Lasers and Systems, (6 October 2003); doi: 10.1117/12.518066
Show Author Affiliations
Vladimir M. Borisov, Troitsk Institute for Innovation and Fusion Research (Russia)
Andrei I. Demin, Troitsk Institute for Innovation and Fusion Research (Russia)
Anatoli V. Eltsov, Troitsk Institute for Innovation and Fusion Research (Russia)
Oleg B. Khristoforov, Troitsk Institute for Innovation and Fusion Research (Russia)
Yuriy B. Kiryukhin, Troitsk Institute for Innovation and Fusion Research (Russia)
Alexander V. Prokofiev, Troitsk Institute for Innovation and Fusion Research (Russia)
Aleksandr Yu. Vinokhodov, Troitsk Institute for Innovation and Fusion Research (Russia)
V. A. Vodchits, Troitsk Institute for Innovation and Fusion Research (Russia)


Published in SPIE Proceedings Vol. 5137:
International Conference on Lasers, Applications, and Technologies 2002: Advanced Lasers and Systems
Guenter Huber; Ivan A. Scherbakov; Vladislav Ya. Panchenko, Editor(s)

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