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Proceedings Paper

Passivation of the 157-nm pellicle with nanometer thin films
Author(s): Yue Kuo; Jiang Lu; Jun-Yen Tewg; Paul A. Zimmerman
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Paper Abstract

The polymeric 157 nm pellicle was passivated on both sides to isolate it from environmental contamination. TAF pellicles were sputter deposited with 5 nm thick films of CaF2, MgF2, Al, Mg, TiN, SiNx, Si, and PTFE, separately. The light transmission and life expectancy of the coated and uncoated pellicles were investigated. The coated pellicles were also analyzed with ESCA for surface structure changes. The coating process changed the pellicle's deterioration mechanism and life expectancy.

Paper Details

Date Published: 17 December 2003
PDF: 4 pages
Proc. SPIE 5256, 23rd Annual BACUS Symposium on Photomask Technology, (17 December 2003); doi: 10.1117/12.517506
Show Author Affiliations
Yue Kuo, Texas A&M Univ. (United States)
Jiang Lu, Texas A&M Univ. (United States)
Jun-Yen Tewg, Texas A&M Univ. (United States)
Paul A. Zimmerman, International SEMATECH (United States)

Published in SPIE Proceedings Vol. 5256:
23rd Annual BACUS Symposium on Photomask Technology
Kurt R. Kimmel; Wolfgang Staud, Editor(s)

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