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Proceedings Paper

Bent multilayer LTCC modules for sensor applications
Author(s): Stanislav Slosarcik; Alena Pietrikova; Wlodzimierz Kalita; Jerzy Potencki; Wieslaw Sabat; L'ubomir Livovsky
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Paper Abstract

The potential of Low Temperature Cofired Ceramic (LTCC) multilayer technology allows to realize different structures for sensor applications. Examples of sensors realized at the Department of Hybrid Microelectronics Technical University in Kosice have shown the quality of being potential or the possibility of developing of LTCC for wide field of thick film sensor applications and for bent multi-layer LTCC modules and their application in thick film pressure sensors. LTCC is a technology suitable for design flexibility comparing with conventional thick film, thin film and high-temperature cofired technologies in electronics. Authors of this paper introduced the concept of using the bent multi-layer LTCC modules in unconventionally shaped electronic devices or in the field of sensors.

Paper Details

Date Published: 22 September 2003
PDF: 5 pages
Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); doi: 10.1117/12.517105
Show Author Affiliations
Stanislav Slosarcik, Technical Univ. of Kosice (Slovak Republic)
Alena Pietrikova, Technical Univ. of Kosice (Slovak Republic)
Wlodzimierz Kalita, Rzeszow Univ. of Technology (Poland)
Jerzy Potencki, Rzeszow Univ. of Technology (Poland)
Wieslaw Sabat, Rzeszow Univ. of Technology (Poland)
L'ubomir Livovsky, Technical Univ. of Kosice (Slovak Republic)

Published in SPIE Proceedings Vol. 5124:
Optoelectronic and Electronic Sensors V
Wlodzimierz Kalita, Editor(s)

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