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Proceedings Paper

A single-crystal piezoelectric scanner for scanning probe microscopy
Author(s): Kee S. Moon; Yong K. Hong; Sung-Q Lee
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Paper Abstract

In this paper, a small size monolithic XY scanner was designed and fabricated. The scanner has a flat triangular shape and consists of two 0.5mm-thick and 5mm-long lead-zinc-niobate-lead-titanate ((1x)Pb(ZnNb)O3 - xPbTiO3) or PZN-PT rods. The use of this material is critical to the reduction of the scanner size. The mechanical resonance characteristics for the PZN-PT rods and the assembled scanner were tested. The fabricated scanner provides a high resonance frequency and assured parallelism between the scanner and the sample surface. It enables a fast open loop control capability that naturally lends itself to use in scanning probe microscopy. The scanner and a self-sensing cantilever were integrated into a small-size atomic force microscope (AFM) design. A commercially available self-sensing cantilever and an additional actuator were used for contact scanning of a HOPG (Highly Ordered Pyrolytic Graphite) sample surface. The scanning performance of the scanner was verified by obtaining atomically resolved image of the HOPG surface.

Paper Details

Date Published: 30 September 2003
PDF: 8 pages
Proc. SPIE 5264, Optomechatronic Systems IV, (30 September 2003); doi: 10.1117/12.515096
Show Author Affiliations
Kee S. Moon, Michigan Technological Univ. (United States)
Yong K. Hong, Michigan Technological Univ. (United States)
Sung-Q Lee, Electronics and Telecommunications Research Institute (South Korea)

Published in SPIE Proceedings Vol. 5264:
Optomechatronic Systems IV
George K. Knopf, Editor(s)

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