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Proceedings Paper

3D sensor for the control of a microassembly robot
Author(s): Rainer Tutsch; Marcus Petz; Michael Berndt; Jurgen Hesselbach; Gero Pokar; Kerstin Heuer
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Paper Abstract

At the Technical University Braunschweig a robot for the assembly of micro structures with an assembly positioning uncertainty below 1 μm is under development. In order to reach the demanded accuracy and robustness, an optical sensor is used. First a 2D-Sensor was tested. To reach the required cycle time a substantial reduction of the response time of this 2D-sensor was necessary. By the application of optimised 2D-algorithms the image processing takes place in video real time now. The extensive software update required an examination of the repeatability results of the 2D-sensor (standard deviation of 0.1 μm in both axes). An overview of the reproducibility and the dynamic cooperation with the parallel robot are presented. A prototype of a 3D-sensor for the robot was built. The reached reproducibility is presented. The 3D-sensor integrated into the robot allows the execution of assembly tasks with a positioning uncertainty better than 1 μm. For the assembly tasks the accurate position of the structures must be determined, which is marked by a defined pattern of circular marks. By photogrammetric measurement of the marks and a pattern recognition the spatial position of the structure is determined. The measurement volume is 7,5 x 11 x 6 mm3. To show the efficiency of the 3D-sensor a first test of its cooperation with the robot is described.

Paper Details

Date Published: 30 September 2003
PDF: 8 pages
Proc. SPIE 5264, Optomechatronic Systems IV, (30 September 2003); doi: 10.1117/12.515065
Show Author Affiliations
Rainer Tutsch, Technische Univ. Braunschweig (Germany)
Marcus Petz, Technische Univ. Braunschweig (Germany)
Michael Berndt, Technische Univ. Braunschweig (Germany)
Jurgen Hesselbach, Technische Univ. Braunschweig (Germany)
Gero Pokar, Technische Univ. Braunschweig (Germany)
Kerstin Heuer, Technische Univ. Braunschweig (Germany)

Published in SPIE Proceedings Vol. 5264:
Optomechatronic Systems IV
George K. Knopf, Editor(s)

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