Share Email Print

Proceedings Paper

Microfabricated components for miniaturized chemical analysis systems
Author(s): Robert B. Darling; Tai-Chang Chen; Adi A. Scheidemann; Paul Yager; Kunchinadka Narayana Hari Bhat
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The roles of microfabricated components for miniaturized chemical analysis systems are reviewed and the fundamental advantages of these components are illustrated in typical analysis and separation systems, including mass spectrometry, electroanalytical chemistry, capillary electrophoresis, and chromatography. In each instance the scaling laws that affect the resolution of the miniaturized instrument are supported by key enabling micromachined components. Micromachined components are also enabling elements for system integration and for coupling multiple techniques together in parallel or cascade.

Paper Details

Date Published: 14 October 2003
PDF: 10 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514726
Show Author Affiliations
Robert B. Darling, Univ. of Washington (United States)
Tai-Chang Chen, Univ. of Washington (United States)
Adi A. Scheidemann, Intelligent Ion, Inc. (United States)
Paul Yager, Univ. of Washington (United States)
Kunchinadka Narayana Hari Bhat, Indian Institute of Technology, Chennai (India)

Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems
S. Mohan; B. Dattaguru; S. Gopalakrishnan, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?